APPROACH OF THE IMPLEMENTATION OF PRESSURE SENSORS IN UP-TO-DATE MEASURING SYSTEM USING IEEE 1451 STANDARD
Gianina Cre · 2007
The up to date level involves tendency of using the sensors and transducers measuring fields. This paper presents a condensed review of nowadays pressure sensors technology, problem implicated and some modern tendencies. In this paper sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Measured pressure is transformed into thick layer nitride membrane deflection. A new type of optical read-out technique for pressure sensors with thin nitride diaphragm has been developed and tested. Main advantages of the sensor are wide dynamic range of measured pressure with excellent resolution. IEEE 1451.2 capabilities were implemented in pressure sensor.