Modeling of test structures for efficient online defect monitoring using a digital tester
Christopher Paul Hess, Larg H. Weiland · 2002
A novel methodology for digital measuring procedures and digital data analysis is presented in order to evaluate an online process control and defect monitoring. That can be done by manufacturing test chips side by side with standard chips and measuring them with the same measuring equipment-the digital tester. To achieve a fast and effective (efficient) measuring procedure and data analysis test structures will be modeled in geometry-graphs, neighborhood-graphs and connection-graphs.>