CMOS IC nanometer technology failure mechanisms

Charles F. Hawkins, Ali Reza Keshavarzi, J. Segura · 2004

CMOS IC test targets are moving markedly with each nanometer technology node. Relatively stable defects, such as bridges and opens endure, but their detection is now often shrouded in a noisy environment with IC parameters that vary widely within the die, from die-to-die, wafer-to-wafer, or lot-to-lot. This variance in parameters introduces new concerns over failure mechanisms that laid mostly dormant for previous technologies. ICs can now fail from an "unlucky" distribution of parameters even though a defect is not present. Die-to-die reordering of critical timing paths is seen in modern ICs. This paper uses the defect-based approach to failure mechanisms that describes their electrical properties and then attempts to match a test method.

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