A multiscale model of mMicro cantilever arrays
Michel Lenczner, Emmanuel Pillet, Scott Cogan, Hui Hui · 2009
We present a simplified model of mechanical behavior of large cantilever arrays with discoupled rows in the dynamic operating regime. Since the supporting bases are assumed to be elastic, cross-talk effect between cantilevers is taken into account. The mathematical derivation combines a thin plate asymptotic theory and the two-scale approximation theory, devoted to strongly heterogeneous periodic systems. The model is not standard, so we present some of its features. We explain how each eigenmode is decomposed into a products of a base mode with a cantilever mode. We explain the method used for its discretization, and report results of its numerical validation with full three-dimensional finite element simulations. Finally, we provide a short description of parameter updating and identification techniques developed for the model.