Extraction of Defect Density and Size Distributions from Wafer Sort Test Results
Jeffrey E. Nelson, Th. Zanon, Rao Desineni, Jason G. Brown, Nishant P. Patil, Wojciech P. Maly, R. D. Blanton · 2006
Defect density and defect size distributions (DDSDs) are key parameters used in IC yield loss predictions. Traditionally, memories and specialized test structures have been used to estimate these distributions. In this paper, we propose a strategy to accurately estimate DDSDs for shorts in metal layers using production IC test results