Modeling and Implementation of Virtual Optical Lithography System Based on Volume Rendering
Qicheng Zhang, Sun Guangyi, Xin Jie Zhao, Wang Junwei, Jin Chun, Guizhang Lu · 2006
Virtual lithography system based on volume rendering is put forward. This system supports the input of masking pattern in BMP format and includes integrated diffraction and standing wave model. In comparison with other lithography simulators, this system supports the full 3D visualization of simulated result and interactive operations such as rotation and slice, which enables the user to fully visualize the internal structure of photoresist.