A novel system for fully automated creation of layout, documentation and test programs for electrical test structures
Georg Leonardelli, G. Roehrer, Rainer Minixhofer, Martin Knaipp · 2004
Modern semiconductor processes have increasing complexity and thus an extremely high number of degrees of freedom. During the development of such a process a large number of test structures are necessary to understand the interaction of process parameters. In this paper we present a new method to streamline the information flow from development to layout and test.