Research on Design and Nonlinear of Piezoelectric Pressure Sensor
Guo Min Lin, Fei Zhou, Chun Feng Li · Applied Mechanics and Materials · 2014
Measuring circuit and equivalent circuit of piezoelectric sensor and its parameters of voltage, capacitance and charge are analyzed. The intensity, the sensitivity and natural frequency of pressure sensor are designed. The influence factors and compensation method of pressure sensor nonlinear such as effective area of diaphragm, pre-tightening force, and temperature are analyzed. Key words: Sensor; Piezoelectric wafer; Measure circuit; Equivalent circuit; Nonlinear