A New Method To Measure The Absolute-humidity Independently Of The Ambient Temperature

M. Kimura · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005

A new method to measure the absolute-humidity independently of the ambient temperature Ta is proposed and demonstrated using a thermal humidity sensor with only a single micro-air- bridge heater, based on the thermal-conductivity change effect in the humid air. Introducing a new simple function /spl Phi/(H) as, /spl Phi/(H) = Vh/sup 2/ - K VI/sup 2/, it is found that K becomes a constant expressed as K= Rh / RI, and /spl Phi/(H) becomes a simple monotonous curve independently of the ambient temperature Ta and that is experimentally demonstrated. We can see that we can easily get the absolute-humidity H from the /spl Phi/(H) - H curve.

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