Variation-sensitive monitor circuits for estimation of Die-to-Die process variation
Islam A. K. M Mahfuzul, Akira Tsuchiya, Kazutoshi Kobayashi, Hidetoshi Onodera · 2011
We propose a set of variation-sensitive ring oscillators (RO) to estimate Die-to-Die process parameter variation. ROs are designed to have different sensitivity to each parameter variation. A method suitable to estimate variation from different ROs is proposed. We have fabricated test chip and successfully estimated process parameter variation. Variation results are correlated with that in Process Control Module data.