Applied design and analysis of microsystems
J.M. Karam, B. Courtois, A. Poppe, Klaus Hofmann, M. Rencz, Manfred Glesner, V. Székely · 2002
Besides foundry facilities, Computer-Aided Design (CAD) tools are also required to move microsystems from research prototypes to an industrial market. This paper describes a computer-aided-design framework for microsystems, based on selected existing software packages adapted and extended for microsystem technology (MST), assembled with libraries where models are available in the form of standard cells described at different levels (symbolic, system/behavioural, layout).