Estimation of parametric sensitivity for defects size distribution in VLSI defect/fault analysis
M. Blyzniuk, Iryna Kazymyra · 2003
The parametric sensitivity of defect size distribution in VLSI defect/fault analysis is evaluated. The use of special software tool FIESTA for the computational experiment aimed at estimation of the significance of parameters in expressions approximating the actual defect distribution is considered. The obtained experimental results and their usefulness have been analysed.