Comments on “Timed Petri Nets in Modeling and Analysis of Cluster Tools”

Mu Der Jeng · IEEE Transactions on Automation Science and Engineering · 2005

In the above paper by Zuberek, conflict-free Petri nets with deterministic timing are used for modeling cluster tools. Performance analysis of the models is based on P-invariants. This comment tries to clarify some statements in the paper and points out a more efficient performance-analysis approach based on linear programming, which is of polynomial time complexity.

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