Design of matching test structures [IC components]
Hans P. Tuinhout · 2002
This paper discusses requirements for test structures for characterization of differences between identically designed IC-components ('matching'). A summary is given of the effects that can cause mismatch and measurement methods are discussed. This results in the definition of a set of matching test structures that enables proper characterization of mismatch. The approach is demonstrated with examples from a 1 /spl mu/m BiCMOS process.>