Ultra-linear, low-cost measurement system for multi-electrode pF-range capacitors
Ferry N. Toth, G.C.M. Meijer, Harry M. M. Kerkvliet · 2002
An extremely accurate capacitance-measurement system has been developed. The system consists of a discrete capacitance-dependent oscillator and a microcontroller. It is suited to measure multi-electrode capacitors, with capacitances up to 2 pF. These can be measured with 100 ppm accuracy with respect to a reference capacitor. The resolution amounts to 50 aF with a 300 ms total measurement time