Charge-based on-chip measurement technique for the selective extraction of cross-coupling capacitances
Alessandro Bogliolo, Loris Vendrame, Luca Bortesi, Ezio Barachetti · 2002
We present a simple test structure (derived from the CBCM technique proposed by Sylvester et al.) that enables the selective extraction of cross-coupling capacitance between arbitrary on-chip interconnects. We discuss the silicon implementation on a 0.18um CMOS process and report preliminary experimental results