Drop in process control checkerboard test structure for efficient online process characterization and defect problem debugging
C. Hess, Larg H. Weiland · 2002
A novel diode-checkerboard test structure (DCTS) is presented to determine open circuit defects and short circuit defects as well as to investigate the 3D-influence of underlying topography. The arrangement of the DCTS in a standard boundary pad frame and the digital measuring procedure evaluate a fast and effective (efficient) online process characterization. The precise defect detection and localization facilitate an additional optical defect problem debugging.>