Resistance modeling of test structures for accurate fault detection in backend process steps using a digital tester
C. Hess, Larg H. Weiland · 2002
A methodology is presented to enable the usage of a digital tester for an accurate detection of open circuits as well as short circuits in test structures to control backend process steps. Therefore, a novel graph model will be introduced to calculate the resistance values of test structures containing defects. The paper gives a comprehensive description of the procedure to adjust the tester parameters to those test structures.