Novel fingerprint scanning arrays using polysilicon TFT's on glass and polymer substrates
N. D. Young, G. Harkin, R.M. Bunn, David J. McCulloch, Richard W. Wilks, Alfred Knapp · IEEE Electron Device Letters · 1997
Novel fingerprint scanning arrays based upon capacitance sensing have been made. Each sensor element consists of a capacitor electrode and two poly-Si thin film transistors for addressing and read out. The devices were fabricated on glass, polyimide and polyethersulphone substrates using a low temperature (<250/spl deg/C) process.