Deadlock avoidance in semiconductor track systems
Naiqi Wu, MengChu Zhou · 2002
Addresses the deadlock avoidance problem in track systems in semiconductor fabrication. Without buffer space in it, the existing deadlock avoidance policies tend to be too conservative. Routing flexibility provides a chance to develop better ones, but makes their computation more complex. The paper models a track system using colored resource-oriented Petri nets. Based on the model, a sufficient condition for deadlock-free operation and the corresponding control law are presented. The proposed policy is shown to be computationally efficient. An example is presented to demonstrate its application.