Optoelectronic Smart Pixels Monallithically Integrated
D. Liepold, U. Kehrli, K. Thelen, Markus Rossi, John E. Epler, Heinz Schweizer, Peter Karl Seitz, Bruce D. Patterson · Proceedings of IEE/LEOS Summer Topical Meetings: Integrated Optoelectronics · 2005
The paper discusses a fabrication process for monolithically integrating MESFETs, photodiodes and light sources intended for use with PMPE optics. This process is compatible with different types of light sources such as a surface emitting LED. These smart pixel arrays are expected to be a key element in massively parallel data processing systems.