Using simulation and genetic algorithms to improve cluster tool performance
Mathias A. Dümmler · 1999
In this paper, we present an approach to generate optimal processing sequences of lots at cluster tools.We consider the problem of sequencing n lots, where each lot can be processed by any of m available cluster tools.The proposed method combines simulation and a genetic algorithm to generate lot processing sequences.We show that our approach leads to a significant reduction of cycle times at cluster tools.