Diffusionsprobleme beim Anfangswachstum dünner Schichten
Ch. Ullner · Kristall und Technik · 1970
Abstract Diffusion is a stochastic process. The known differential equation of diffusion theory is valid on assumptions which are not realized always at the beginning of thin film growth. Moreover the stochastic processes of aggregation produce cluster size distribution in which each cluster size has an own probability distribution. In a simple example the probability distribution of adatom concentration is calculated.