Paired FinFET Charge Trap Flash Memory for Vertical High Density Storage
S. Kim, Woo Seok Kim, J. Hyun, Sangjin Byun, Junemo Koo, J. Lee, K. Cho, Suhwan Lim, Jung Ock Park, I.-K. Yoo, C.-H. Lee, D. Park, Young-Shin Park · 2006
A new type of memory, paired FinFET charge trap memory is reported. It consists of two split silicon fins and insulator between them. Two channels are formed on the outer surface of silicon so doubled integration density can be achieved. We successfully fabricated paired FinFET SONOS devices. It shows good program and erase characteristics. Independent programming on each storage nodes is demonstrated. The circuit configuration for NAND flash application is also proposed