Modeling with hierarchical petri net of semiconductor manufacturing system
Huang Dan, Yan Juan-wei, Fei Qiao · 2005
A new kind of hierarchical Petri net (HPN) and its modeling approach for semiconductor manufacturing system are presented in this paper. Firstly, the applications of Petri nets in semiconductor manufacturing system are briefly reviewed. Then the definition of HPN and its modeling procedure are given. Finally, an application-oriented case study is illustrated.