Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes
Jiří Háze, J Pekárek, Martin Magát, Michal Pavlík, Radimı́r Vrba · European Microelectronics and Packaging Conference · 2011
The paper deals with novel Micro-Electro-Mechanical System (MEMS) structure. The structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was selected by means of electrostatic model analysis made by MatLAB software. There were proposed five structures and the best solution was selected as the “chessboard” structure, since it provides the suitable capacity for the sensor measurement range. The overall capacity and also sensitivity of the MEMS sensor was increased by means of carbon nanotubes (CNTs). Therefore the pressure measurement range increased as well. The comparison between conventional capacitance sensor structures and the presented proposal shown, that the improvement depends on the area and number of the growing fields. However this improvement is from tens to hundereds of percents. The article depicts the design process including simulations and analysis of the chosen structure too.