A Wireless Microsystem for MEMS Capacitive Sensor Using Bluetooth
Jirachai Getpreecharsawas, Lynn F. Fuller · 2008
In this paper, the design of a microsystem for MEMS capacitive sensor with integrated data converter circuits and wireless monitoring capability has been presented. The data converter circuits operate with dual functionalities - capacitive readout and analog-to-digital (A/D) conversion without the use of a conventional A/D converter. The wireless capability is attained by taking the advantage of a secured and ubiquitous Bluetooth standard. Based on this work, an off-chip Bluetooth transceiver is utilized.