The research of the stochastic reward net model for the cluster tool in serial-parallel mode
Xiuhong Zheng, Jingtao Hu, Haibin Yu · 2011
The proliferation of cluster tools in semiconductor manufacturing motivates an understanding of how basic parameters determine the performance of cluster tools. This paper presents three general stochastic reward net models of serial-parallel cluster tools to describe the processing procedure of them. They help to effectively analyze and evaluate the performance of cluster tools on different demands.