The modeling and control of the cluster tool in semiconductor fabrication
Han‐Pang Huang, Che-Lung Wang · 2002
A single wafer processing IC fabrication with flexible and distributed configuration is becoming more important. The cluster tool is such an IC fabrication equipment. It consists of a cassette module, transport module, and process module. In the paper, the model of a cluster tool is constructed using a distributed colored timed Petri net. The emulator and controller of the cluster tool are further constructed. The standards of SECS, HSMS and GEM are used to develop the intelligent module controller. Finally, a web-based remote controller is developed and the SPC module is built in the cluster tool.