Timed Petri net models of cluster tools
W.M. Zuberek · 2002
Timed Petri nets are used as models of cluster tools, representing not only the concurrent activities of different chambers, but also the durations of these activities. Structural analysis, based on net invariants, provides basic performance measures, such as throughput and cycle time. The results are obtained in symbolic form, so many specific alternatives can easily be compared without repeated analyses of the models.