Physical Principles of Thermal Sensors
Sander van Herwaarden · 1996
In this paper, we describe themlal sensors based on silicon and related technologies, with an electrical output signal. The input signal can be any of the six signal types defined by Middelhoek and Audet,(l) i.e., mechanical, magnetic, chemical, radiant, themlal and electrical signals. In themlal sensors, the transduction of the input signal to the output signal is carried out in two steps. First the input signal is transduced into a themlal signal, and then the themlal signal is transduced into the eleetrical output signal.