Top-down design flow for MOEMS
Gunar Lorenz, Arthur S. Morris, Issam A. Lakkis · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001
As MOEMS (Micro-Opto-Electro-Mechanical Systems) transition from laboratory curiosities to production products inserted into telecommunication systems, a top down design flow is necessary to minimize time-to-market. We present a structured- custom approach for MOEMS design based on the concept of using parameterized behavioral models as a means to improve and speed up the design process. This approach enables a user to quickly explore a larger design space on the interaction of the behavioral models with their surrounding system. Once the simulation is completed to the designer's satisfaction, a device layout can be output for FEM verification on critical areas or to generate the masks for fabrication.