A fully automated pulsed laser deposition system for HTS multilayer devices
J.H. Clark, G.B. Donaldson, Robert M. Bowman · IEEE Transactions on Applied Superconductivity · 1995
For the fabrication and development of high-temperature superconducting (HTS) thin film devices, which often require multiple layers, it is essential to have control over all parameters during growth. Until recently the overwhelming majority of film growth was controlled manually. We have found this can often lead to error and irreproducibility. To overcome these problems we have designed and constructed an automated multitarget excimer pulsed laser deposition (PLD) system. We identify key elements of the system that can be utilised to address many of the problems currently encountered in HTS film growth. Optimisation using Robust Design techniques has also been used in the identification of principal parameters in growth of films and multilayers.>