Accurate multiplexed test structure for threshold voltage matching evaluation
Loic Welter, Philippe Dreux, Jordan Innocenti, Hassen Aziza, Jean-Michel Portal · 2014
This paper presents a multiplexed test structure able to measure a large number of transistor threshold voltages within a scribe line. To achieve this, switches are used to select a single transistor among others in a small multiplexed array. A study to evaluate the influence of this multiplexing system on electrical measurement is conducted. Post-layout simulations are presented to validate the concept for transistor matching characterization.