Statistical shape analysis applied to microlithography
Alessandra Micheletti, Ermes Severgnini, Filippo Terragni, Mauro Vasconi · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006
In this paper we introduce recent mathematical tools for shape description called size functions. Some features of these descriptors such as robustness with respect to noise are pointed out. A first attempt to join the theory of size functions with randomness and to develop the related statistical analysis is then presented. The resulting procedure is applied to some specific problems which arise in microlithography of electronic devices.