Transducers 2001/EUROSENSORS XV 10‐14 June 2001, Munich
Peter K. M. McGeehin · Sensor Review · 2001
Reviews the Transducers 2001/EUROSENSORS XV conferences that were held in Munich, 10‐14 June 2001. Microengineering figured prominently in the programme, almost half the sessions covering aspects of this subject, including power generation, packaging and wafer bonding, physical effects, machining and etching (also for high aspect ratio), micro‐thrusters, ‐jets, ‐pumps, ‐valves, ‐fluidics, ‐probes, optical 3D and RF MEMS, resonators, polymer based microsystems and commercialisation. Explicit sensor sessions included materials for gas sensing, chemical and gas sensors, biomedical systems, electrochemical sensors, inertial sensors, magnetic sensors, image, flow and thermal sensors. There were two sessions on actuators. Nano‐devices (physical in character) were covered in one session, though nanotechnology as such did not figure in the proceedings.