Novel multijunction thermal converter in planar technique for AC current, voltage, power and optical radiation measurement
M. Klonz, Th. Weimann · Physica Scripta · 1990
A new planar thin film design of multijunction thermocouples on a silicon chip containing a window with a SiO 2 -membrane for low heat conductance underneath of the thermocouples is described. It is used as the sensor for the temperature difference in a multijunction thermal converter for ac-dc transfer of electrical quantities like voltage, current and power via Joule heat in a thin film resistor. By coating the heater with an optically absorbing layer it is used as a highly sensitive radiometer transferring absorbed energy to Joule heat in the resistor. The design can easily be optimized for all different frequency applications. It offers the possibility of the mass production of transfer standards at highest level of accuracy.