3D profiling of thin film using contour analysis of interference fringe image and interpolation method
Hyun‐Soo Kang, Jae‐Won Suh, Yun-Ho Ko · 2012
In this paper we propose a new framework to obtain 3D shape information of thin film rapidly. The conventional equipments based on reflectometry are not suitable for obtaining 3D overall shape information of thin film rapidly since they require more than 30 minutes to measure the absolute thickness for 170 points. The proposed framework is based on an image analysis method that extracts contour lines from interference fringes images using Canny edge detector. The absolute thicknesses for contour lines are measured and then a height map from the contour lines is obtained by interpolation using modified Borgefors distance transformation. The extracted height map is visualized using the DirectX 3D terrain rendering method. The proposed framework can provide 3D overall shape information of thin film in about 5 minutes since relatively small number of real measurement for contour lines is required.