Use of a piezo-driven cantilever beam as a sensor for electrostatic voltmeter

Jerzy Kieres, Maciej A. Noras, William A. Maryniak · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006

In this paper authors examine the design and implementation of a cantilever beam-style probe for non-contacting electrostatic voltmeter. The beam is driven by a piezoelectric actuator with a feedback loop controlling amplitude of the electrostatic sensor displacement. Choice of the vibration mode and placement of the actuator and sensor are discussed. A simple model for the first three natural frequencies of the beam is constructed and compared with the experimental results.

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