Method for measurement of capacitance, series and shunt resistances of semiconductor junctions, and their voltage dependence
G Popkirov, Nikola Tabov · Review of Scientific Instruments · 1982
A method and an electronic circuit for measurement of capacitance, series and shunt resistances of semiconductor junctions, and their dependence on the voltage applied across the junction are described. The method is based on comparing the current transient waveforms of the sample under test and of a reference capacitor, with series and shunt resistors connected to it, obtained with square-wave voltage pulses.