Design of microelectromechanical systems for variability via chance-constrained optimization
Kan-Lin Hsiung · Journal of Physics Conference Series · 2006
In this paper we describe a robust design method for microelectromechanical systems (MEMS) subject to inherent geometric and material uncertainties. We propose to formulate the robust MEMS design with variability problem as a specific optimization problem, namely chance-constrained posynomial programming, in which the statistical variations of both the process parameters and design variables can be easily incorporated. Using such constrained optimization approach, automated robust design can be obtained with very suboptimal design cost, and parametric yield of each specification can be guaranteed. Finally, the method is illustrated by considering the example of a simple crab-leg resonator.