Design of a new PZT based microphone and microspeaker
Ren Tian-Ling, Lintao Zhang, Litian Liu, Zhijian Li · Ferroelectrics · 2001
A new ferroelectrics-silicon integrated microphone and microspeaker is proposed. A Pt/Ti/Pb(Zr0.53Ti0.47)O3/Pt/Ti/SiO2/Si3N4 cantilever structure is adopted as the main component of the microphone and microspeaker. The cantilever structure is theoretically designed and simulated using multimorph model. The sensitivity and the sound pressure level (SPL) of the integrated microphone and microspeaker structure are calculated. It is found that the sensitivity of the microphone and the SPL of the microspeaker are both higher than those of other microphones and microspeakers that have ever been reported.