Architecture and overview of MMST machine control [semiconductor manufacturing facilities]
Ray Beaver, Alex Coleman, Dirk Draheim, Albert Jakobus Hoffman · IEEE Transactions on Semiconductor Manufacturing · 1994
This article describes the configurable MMST (Microelectronics Manufacturing Science and Technology) machine control architecture. The architecture has been developed to allow for quick insertion into current fabrication facilities while also allowing for a complete bottoms-up implementation of the machine control software. The MMST machine control is specifically designed to work with the next generation of vacuum-processing cluster tools currently under development by semiconductor equipment vendors and provides a windows based, graphical control panel for the equipment user.>