Methods Of Determining Optical Constants Of Thin Semiconductor Films Using Normal Incidence Reflectance And Transmittance Data
David Robert McKenzie, R. C. McPhedran, Nick Savvides, L. C. Botten, P. J. Martin, Roger P. Netterfield · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1983
Techniques for determining the optical constants of thin absorbing films are described and applied to the evaluation of the optical constants of carbon and silicon semiconductor films prepared by magnetron sputtering and ion beam sputtering techniques. The results are discussed with emphasis on the nature and origin of the optical gaps.