The application of e beam inspection on 3D NAND flash
Hsiang-Chou Liao, Yi-Chin Chen, Guan-Ru Lee, Yen-Hao Shih, Hang-Ting Lue, Tuung Luoh, Ling-Wu Yang, Kuang-Yeu Hsieh, Tahone Yang, Kuang‐Chao Chen, Rich Liu, Chih-Yuan Lu · 2012
Various three-dimensional (3D) multilayer stacks NAND flash architectures are developed by several companies, the defect performance monitoring under such complicated architectures has become a new challenge in 3D NAND flash. The aim of this paper is to illustrate e beam inspection system can monitor the tiny, invisible defects and electrical defects that can not be recognized by optical systems.