The Analysis of Diffusion Data by a Method of Moments
R. Ghez, Joseph D. Fehribach, Gottlieb S. Oehrlein · Journal of The Electrochemical Society · 1985
We develop a method for extracting diffusivities from concentration profiles that uses the moments of these profiles. We show that these moments are coefficients of polynomial equations in the fitting parameter ; these equations are easily solved. The method does not rely on the estimation of slopes or of functional values; it is therefore both accurate and simple to use. We apply this method to the case of P redistribution by rapid thermal annealing of ion‐implanted Si.