MEMS Technology- from Automotive to Consumer
Jiri Marek · 2007
Bosch has been a supplier for MEMS automotive sensors for more than a decade. After starting in the early '90s with some ground-lying basic technology development (the Bosch process for DRIE, release etch technology, and others), Bosch introduced pressure sensors, air mass flow sensors, accelerometers and gyroscopes into the automotive industry. These MEMS products have become enablers for many advanced automotive systems that make cars safe, clean and economical: Advanced fuel injection systems for engine management, passive and active safety systems, climate control systems, navigation and others. This talk reviews the key role of MEMS technology products for the progress of automotive electronics and gives an outline for their use in a world of applications in the consumer electronics industry.