Liquid immersion deep-UV optical disc mastering for high data capacity ROM discs
Jaap H. M. Neijzen, Erwin R. Meinders, Marius I. Boamfa, Dianyong Chen · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005
In this paper we describe the liquid immersion mastering technique and its application to the mastering of ROM discs for the Blu-ray Disc system and for ROM discs with considerably higher data densities. Replicated 25GB BD-ROM discs were evaluated using a standard blue test player (λ=405nm, NA=0.85). A bottom jitter value with limit equalizer of less than 5% was measured. Also the values of asymmetry, normalized push pull and symbol error rate were well within the Blu-ray Disc format specification, offering a large process window. Full-format BD-ROM test discs with high definition video content were mastered and their successful read-back was demonstrated. In addition we show that liquid immersion mastering can successfully be applied for mastering of considerably higher densities. Measurements on replicated discs up to data densities above 40GB per layer are discussed. The present results demonstrate that liquid immersion mastering is a proven technology for the mass-production of high data capacity ROM discs.