Cellular automata modeling of microcrystalline structure formation
Mikhail Mikolaychuk, Anna Georgievna Knyazeva · AIP conference proceedings · 2014
The paper discusses the problem of microcrystalline structure formation during magnetron sputtering.The authors suggest the model based on cellular automata approach combined with chemical kinetics considerations, briefly discuss a practical way for kinetic constants evaluation and derive their accurate values.The work numerically solves a particular problem of coating formation by magnetron sputter deposition in multicomponent chemically active plasma.