FEM and measurement analysis for flow sensor featuring three different operating modes
Almir Talić, Samir Ćerimović, F. Köhl, Roman Beigelbeck, J. Schalko, Franz Keplinger · Procedia Engineering · 2010
A novel sensor design comprising four high resolution germanium thermistors and one heating resistor offers three different operating modes. Measurements confirmed very high sensitivity for conventional calorimetric transduction (modes 1 and 2). In a mixed calorimetric-anemometric mode (mode 3), based on the self heating effect of the employed thermistors, the sensor combines extremely low power consumption with high flow sensitivity. Additionally, an unambiguous transduction characteristic over a wide flow range is available. As output quantities, we analyze the temperature difference of the thermistors, the bridge unbalanced voltage and the voltage across the supply terminals. The simulation results are in good agreement with corresponding measurement data confirming the basic assumptions and the modelling approach.